> Publication > Patents
Year of publication | 2016 |
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Subject | Multi-selective CMP 슬러리 |
Name | 박재근, 백운규, 박진형, 김예환, 최호, 조종영, 황희섭, 임재형 |
Registration Number | 9287132 |
Registration Date | 2016/03/15 |
Registration Country | US |
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Status | ![]() |