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7 |
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"Effect of crystallinity of ceria particles on the PETEOS removal rate in chemical mechanical polishing for shallow trench isolation (Conference Paper)" Kim, J.Y., Kim, S.K., Paik, U., Katoh, T., Park, J.G.
Journal of the Korean Physical Society, 2002~ |
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1 |
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"The effect of agglomerated particle size on the chemical mechanical planarization for shallow trench isolation" Kim, S.-K. , Yoon, P.-W. , Paik, U. , Katoh, T. , Park, J.-G.
Journal of Ceramic Processing Research, 2002~ |
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